MAR1110.E | 2D Scanning Mirror

MEMS 2D LASER SCANNING MIRROR

A 2D MIRROR WITH BOTH ELECTROSTATIC AND ELECTROMAGNETIC ACTUATION METHODS​

A MEMS (Micro Electro Mechanical System) mirror is a tiny solid-state scanning mirror (mirror on a chip) actuated by micro-size motors to move in one or two scanning directions. In order to create a laser-based display, a laser beam pointed at the mirror is precisely deflected and steered by the scanning mirror to reach a target point at a specific time.

KEY FEATURES AND BENEFITS

  • 2D single mirror using a gimballed structure – it minimizes optical engine size and increases optical efficiency for 2-axis scanning

  • Combination of electrostatic actuator for the fast axis and electromagnetic actuator for the slow axis – improves robustness and optimizes performance for 2D scanning

  • Wide optical field of view (FOV), up to 45° (fast axis) & up to 30° (slow axis) – delivers large image and scanning area

  • Highly-sensitive, dynamic, 2D closed control feedback circuit – maintains stable peak performances even during changes in ambient conditions and manufacturing tolerances of the MEMS scanning mirrors

  • Mirror problem alarm signal both for the fast axis and the slow axis – supports eye safety operation of projection device

  • Compatible to a mirror controller with a standard digital video interface – simplifies system design and integration to other devices

  • Non-hermetic plastic package – reduces cost and maintains peak performances for MEMS scanning mirrors

  • Temperature Stability – gives a perfect image over a wide temperature range

MEMS Mirrors Flexibility and Customization

Packaging​

Maradin uses different packages for the 2D MEMS scanning mirrors that can be fully adapted to the needs of different systems and devices
  • Plastic package is ideal for low cost consumer applications of display and sensing using laser scanning
  • Ceramic packages can meet the requirements of the automotive market and high reliability requirement devices

Optical coating

Maradin has the ability to adjust the coating of the 2D MEMS scanning mirrors to the different wavelengths.
  • A high Laser Damage Threshold (LDT) to meet reliability and performance requirements of high laser power applications
  • Custom laser wavelength coating using Bragg reflectors to increase reflectivity
  • High reflectivity for UV (405nm), Visible (450~700), IR (800~1550) lasers

Connectivity​

Maradin uses different packages for the 2D MEMS scanning mirrors that can be fully adapted to the needs of different systems and devices
  • Maradin's 2D MEMS scanning mirrors can work with internal laser or be synchronizes to external lasers
  • Maradin's 2D axis MEMS scanning mirror can be extended from the mirror controller up to 50cm to provide design flexibility and agility
  • Synchronization of several of Maradin's 2D axis MEMS scanning mirrors together is achieved by using Maradin’s system firmware proprietary architecture
  • The sensing signals of both the fast axis and the slow axis of the 2D MEMS scanning mirror can serve as alarms for enhanced eye safety mechanisms

MAR1110.E MEMS 2D Scanning Mirrors Common Applications

  • Automotive

    Automotive grade design includes a special hermetic package with advanced heat dissipation. It has high stability for vibrations and temperature changes and maintains peak performance of Maradin's 2D MEMS scanning mirror.

  • AR/VR Display

    A low-power design has a non-uniform pixel distribution to form a proprietary foveated view, while utilizing laser-to-MEMS scanning mirror synchronization. This product has extremely compact volume packaging options.

  • Pico Projector

    This is a flexible Picture Generating Unit (PGU) design with a variety of laser wavelengths and optical coating options for laser projection devices.

MAR1110.E – MEMS SCANNING MIRROR SPEC:

Item Specification
Optical angle (H x V)
Typ.: 45x20 Deg. | Max: 45x30 Deg.
Resolution (HxV)
Typ.: 1280x480 pixels | Max: 1280x600 pixels
Pixel position error
+/- 1/5 pixel
Resonance frequency (H)
10,750 Hz
Resonance frequency (V)
1800 Hz
Effective mirror size (H)
1 mm
Effective mirror size (V)
1.1 mm
MEMS Scanning Module dimensions (L x W x H)
Typ.: 10×5.5×5 mm
MEMS Scanning module power consumption
70 mW (rms)
Package
Typ.: Plastic, Non-Hermetic | Custom: Ceramic, Hermetic
Item Specification
Throw Ratio
1.2
Incident angle (H)
0 Deg.
Incident angle (V)
15 – 22 Deg.
Mirror reflectance
Typ.: 90-98% (Aluminium coating)Max: 99.5% (High Reflective Coating)
Overall reflectance
>85% (Mirror & Optical window)
Wavelength range for reflection
Typ.: 440 -700 mmCustom: Any wavelength upon request
laser max spot size
0.7 mm

FAQs MAR1110.E :

The MAR1110.E 2D MEMS scanning mirror is an improved version of the MAR1100.E 2D MEMS scanning mirror.  It has improved maximal stress design, better sensing signals and a more simplified manufacturing process

Yes.  The MAR1110.E 2D MEMS scanning mirror has different actuation methods for every scanning direction.  Electromagnetic actuation is used for the slow scanning axis and electrostatic actuation is used for the fast scanning axis.

We use capacitive sensing technology for both the fast and slow scanning axes.  For each scanning direction, a set of sensing comb-drives is carved into the silicon structure of the MEMS, providing an accurate sensing signal on the MEMS position.

Maradin has several MEMS mirrors controllers.  The MAR1110.E 2D MEMS scanning mirror can work with both the MAR2100 analog mirror controller and the MAR2200 digital mirror controller.

MEMS Evaluation Kit
MEMS Mirrors MAR1110.E in Numbers
0

MEMS die
in each
wafer

0

Process steps
are performed
in our MEMS process

More than

0

collective years of
MEMS
experience

Above

0
%

Reflectivity
for a variety of
wavelengths

0

scanning directions

for every
micro-mirror
device

Let's Talk​

Intersted with Our Technology?

Order the Eavalution Kit

2d scanning MEMS Evaluation Kit enables Maradin`s laser-based projection core components

Get Started Now!
Skip to content