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MEMS 2D LASER SCANNING MIRROR
A 2D MIRROR WITH BOTH ELECTROSTATIC AND ELECTROMAGNETIC ACTUATION METHODS
A MEMS (Micro Electro Mechanical System) mirror is a tiny solid-state mirror (mirror on a chip) actuated by micro-size motors in one or two dimensions. A laser beam pointed at the mirror is precisely deflected and steered by the scanning mirror to reach a target point at a specific time.
KEY FEATURES AND BENEFITS
- 2D single mirror– Minimizes optical engine size and increases optical efficiency
- Combination of electrostatic (H) and electromagnetic (V) actuators – Improves robustness and optimizes performance
- Wide optical FOV, up to 45° (H) & up to 30° (V) – Delivers large image/scan area
- High-sensitivity, dynamic closed control loops – Maintain stable peak performance even during changes in ambient conditions
- Static mirror alarm signal – Supports eye safety
- MEMS controller with standard digital video interface – Simplifies system design and integration
- Non-hermetic plastic package – Reduces cost
- Temperature Stability – A perfect image over a wide temperature range
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MEMS Mirrors Flexibility and Customization
Maradin package can be fully adapted to the needs of different systems
- Plastics, ideal for low cost consumer applications of display and sensing
- Ceramics, could meet the requirements of the automotive market
Maradin has the ability to adjust the coating of the MEMS to the different wavelengths.
- Laser Damage Threshold
- Custom laser wavelength coating using Bragg reflectors
- High reflectivity for UV (405nm), Visible (450~700), IR (800~1550) lasers
- Mardin’s MEMS Mirror can work with internal laser or synchronize to external laser
- MEMS could be Extended from the controller up to 50cm
- Synchronization of several mirrors together
- The sensing signals of the MEMS could serve as safety alarms
MAR1100.E MEMS 2D Scanning Mirrors Common Applications
Automotive grade design, including a special hermetic packaging with advanced heat dissipation.
High stability for vibrations and temperature changes
A low power design, with a non-uniform pixel distribution to form a proprietary foveated view. Extremely compact volume and packages options
A flexible Picture Generating Unit (PGU) design with a verity of laser wavelengths and optical coating options
MAR1100.E – MEMS SCANNING MIRROR SPEC:
|Optical angle (H x V)||Typ.: 45×20 Deg. | Max: 45×30 Deg.|
|Resolution (HxV)||Typ.: 1280×480 pixels | Max: 1280×600 pixels|
|Pixel position error||+/- 1/5 pixel|
|Resonance frequency (H)||10,250 Hz|
|Resonance frequency (V)||1800 Hz|
|Effective mirror size (H)||1 mm|
|Effective mirror size (V)||1.1 mm|
|MEMS Scanning Module dimensions (L x W x H)||Typ.: 12×6.5×5.9 mm | Small: 10×5.5×4.6 mm|
|MEMS Scanning module power consumption||70 mW (rms)|
|Package||Typ.: Plastic, Non-Hermetic | Custom: Ceramic, Hermetic|
|Incident angle (H)||0 Deg.|
|Incident angle (V)||15 – 22 Deg.|
|Mirror reflectance|| Typ.: 90-93% (Aluminium coating)|
Max: 99.5% (High Reflective Coating)
|Overall reflectance||85% (Mirror & Optical window)|
|Wavelength range for reflection|| Typ.: 440 -700 mm|
Custom: Any wavelength upon request
|laser max spot size||0.7 mm|
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MEMS Mirrors MAR1100.E in Numbers
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