MAR1100.E | 2D Scanning Mirror

MEMS 2D LASER SCANNING MIRROR

A 2D MIRROR WITH BOTH ELECTROSTATIC AND ELECTROMAGNETIC ACTUATION METHODS

A MEMS (Micro Electro Mechanical System) mirror is a tiny solid-state mirror (mirror on a chip) actuated by micro-size motors in one or two dimensions. A laser beam pointed at the mirror is precisely deflected and steered by the scanning mirror to reach a target point at a specific time.

KEY FEATURES AND BENEFITS

  • 2D single mirror– Minimizes optical engine size and increases optical efficiency

  • Combination of electrostatic (H) and electromagnetic (V) actuators – Improves robustness and optimizes performance

  • Wide optical FOV, up to 45° (H) & up to 30° (V) – Delivers large image/scan area

  • High-sensitivity, dynamic closed control loops – Maintain stable peak performance even during changes in ambient conditions

  • Static mirror alarm signal – Supports eye safety

  • MEMS controller with standard digital video interface – Simplifies system design and integration

  • Non-hermetic plastic package – Reduces cost

  • Temperature Stability – A perfect image over a wide temperature range

  • MEMS Mirrors Flexibility and Customization

    Packaging

    Maradin package can be fully adapted to the needs of different systems

    • Plastics, ideal for low cost consumer applications of display and sensing

  • Ceramics, could meet the requirements of the automotive market

  • Optical coating

    Maradin has the ability to adjust the coating of the MEMS to the different wavelengths.

    • Laser Damage Threshold

  • Custom laser wavelength coating using Bragg reflectors

  • High reflectivity for UV (405nm), Visible (450~700), IR (800~1550) lasers

  • Connectivity

    • Mardin's MEMS Mirror can work with internal laser or synchronize to external laser

  • MEMS could be Extended from the controller up to 50cm

  • Synchronization of several mirrors together

  • The sensing signals of the MEMS could serve as safety alarms

  • MAR1100.E MEMS 2D Scanning Mirrors Common Applications

    • Automotive

      Automotive grade design, including a special hermetic packaging with advanced heat dissipation. High stability for vibrations and temperature changes

    • AR/VR Display

      A low power design, with a non-uniform pixel distribution to form a proprietary foveated view. Extremely compact volume and packages options

    • Pico Projector

      A flexible Picture Generating Unit (PGU) design with a verity of laser wavelengths and optical coating options

    MAR1100.E – MEMS SCANNING MIRROR SPEC:

    Item Specification
    Optical angle (H x V)
    Typ.: 45x20 Deg. | Max: 45x30 Deg.
    Resolution (HxV)
    Typ.: 1280x480 pixels | Max: 1280x600 pixels
    Pixel position error
    +/- 1/5 pixel
    Resonance frequency (H)
    10,250 Hz
    Resonance frequency (V)
    1800 Hz
    Effective mirror size (H)
    1 mm
    Effective mirror size (V)
    1.1 mm
    MEMS Scanning Module dimensions (L x W x H)
    Typ.: 12×6.5×5.9 mm | Small: 10×5.5×4.6 mm
    MEMS Scanning module power consumption
    70 mW (rms)
    Package
    Typ.: Plastic, Non-Hermetic | Custom: Ceramic, Hermetic
    Item Specification
    Throw Ratio
    1.2
    Incident angle (H)
    0 Deg.
    Incident angle (V)
    15 – 22 Deg.
    Mirror reflectance
    Typ.: 90-93% (Aluminium coating) Max: 99.5% (High Reflective Coating)
    Overall reflectance
    85% (Mirror & Optical window)
    Wavelength range for reflection
    Typ.: 440 -700 mm Custom: Any wavelength upon request
    laser max spot size
    0.7 mm
    MEMS Mirrors MAR1100.E in Numbers
    0

    MEMS die
    in each
    wafer

    0

    Process steps
    are performed
    in our MEMS process

    More than

    0

    years of
    MEMS
    experience

    Above

    0
    %

    Reflectivity
    for variety of
    laser range

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    2d scanning MEMS Evaluation Kit enables Maradin`s laser-based projection core components

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