MEMS 2D LASER SCANNING MIRROR
A MEMS (Micro Electro Mechanical System) mirror is a tiny solid-state mirror (mirror on a chip) actuated by micro-size motors in one or two dimensions. A laser beam pointed at the mirror is precisely deflected and steered by the scanning mirror to reach a target point at a specific time.
MEMS Mirrors Flexibility and Customization
Maradin package can be fully adapted to the needs of different systems
Maradin has the ability to adjust the coating of the MEMS to the different wavelengths.
MAR1100.E MEMS 2D Scanning Mirrors Common Applications
MAR1100.E – MEMS SCANNING MIRROR SPEC:
Optical angle (H x V)
Typ.: 45x20 Deg. | Max: 45x30 Deg.
Typ.: 1280x480 pixels | Max: 1280x600 pixels
Pixel position error
+/- 1/5 pixel
Resonance frequency (H)
Resonance frequency (V)
Effective mirror size (H)
Effective mirror size (V)
MEMS Scanning Module dimensions (L x W x H)
Typ.: 12×6.5×5.9 mm | Small: 10×5.5×4.6 mm
MEMS Scanning module power consumption
70 mW (rms)
Typ.: Plastic, Non-Hermetic | Custom: Ceramic, Hermetic
Incident angle (H)
Incident angle (V)
15 – 22 Deg.
Typ.: 90-93% (Aluminium coating)Max: 99.5% (High Reflective Coating)
85% (Mirror & Optical window)
Wavelength range for reflection
Typ.: 440 -700 mmCustom: Any wavelength upon request
laser max spot size