MAR1100.E | 2D Scanning Mirror

MEMS 2D LASER SCANNING MIRROR​

A 2D MIRROR WITH BOTH ELECTROSTATIC AND ELECTROMAGNETIC ACTUATION METHODS​

A MEMS (Micro Electro Mechanical System) mirror is a tiny solid-state mirror (mirror on a chip) actuated by micro-size motors in one or two dimensions. A laser beam pointed at the mirror is precisely deflected and steered by the scanning mirror to reach a target point at a specific time.

KEY FEATURES AND BENEFITS

  • 2D single mirror– Minimizes optical engine size and increases optical efficiency

  • Combination of electrostatic (H) and electromagnetic (V) actuators – Improves robustness and optimizes performance

  • Wide optical FOV, up to 45° (H) & up to 30° (V) – Delivers large image/scan area

  • High-sensitivity, dynamic closed control loops – Maintain stable peak performance even during changes in ambient conditions

  • Static mirror alarm signal – Supports eye safety

  • MEMS controller with standard digital video interface – Simplifies system design and integration

  • Non-hermetic plastic package – Reduces cost

  • Temperature Stability – A perfect image over a wide temperature range

MEMS Mirrors Flexibility and Customization

Packaging

Maradin package can be fully adapted to the needs of different systems

  • Plastics, ideal for low cost consumer applications of display and sensing

  • Ceramics, could meet the requirements of the automotive market

Optical coating

Maradin has the ability to adjust the coating of the MEMS to the different wavelengths.

  • Laser Damage Threshold

  • Custom laser wavelength coating using Bragg reflectors

  • High reflectivity for UV (405nm), Visible (450~700), IR (800~1550) lasers

Connectivity

  • Mardin's MEMS Mirror can work with internal laser or synchronize to external laser

  • MEMS could be Extended from the controller up to 50cm

  • Synchronization of several mirrors together

  • The sensing signals of the MEMS could serve as safety alarms

MAR1100.E MEMS 2D Scanning Mirrors Common Applications

  • Automotive

    Automotive grade design, including a special hermetic packaging with advanced heat dissipation. High stability for vibrations and temperature changes

  • AR/VR Display

    A low power design, with a non-uniform pixel distribution to form a proprietary foveated view. Extremely compact volume and packages options

  • Pico Projector

    A flexible Picture Generating Unit (PGU) design with a verity of laser wavelengths and optical coating options

MAR1100.E – MEMS SCANNING MIRROR SPEC:

Item Specification
Optical angle (H x V)
Typ.: 45x20 Deg. | Max: 45x30 Deg.
Resolution (HxV)
Typ.: 1280x480 pixels | Max: 1280x600 pixels
Pixel position error
+/- 1/5 pixel
Resonance frequency (H)
10,250 Hz
Resonance frequency (V)
1800 Hz
Effective mirror size (H)
1 mm
Effective mirror size (V)
1.1 mm
MEMS Scanning Module dimensions (L x W x H)
Typ.: 12×6.5×5.9 mm | Small: 10×5.5×4.6 mm
MEMS Scanning module power consumption
70 mW (rms)
Package
Typ.: Plastic, Non-Hermetic | Custom: Ceramic, Hermetic
Item Specification
Throw Ratio
1.2
Incident angle (H)
0 Deg.
Incident angle (V)
15 – 22 Deg.
Mirror reflectance
Typ.: 90-93% (Aluminium coating)Max: 99.5% (High Reflective Coating)
Overall reflectance
85% (Mirror & Optical window)
Wavelength range for reflection
Typ.: 440 -700 mmCustom: Any wavelength upon request
laser max spot size
0.7 mm
MEMS Mirrors MAR1100.E in Numbers
0

MEMS die
in each
wafer

0

Process steps
are performed
in our MEMS process

More than

0

years of
MEMS
experience

Above

0
%

Reflectivity
for variety of
laser range

Let's Talk​