MAR1500 | 1D Scanning Mirror

MAR1500 1D MEMS LASER SCANNING MIRROR (1.5MM)

MAR1500 is a 1D, single-axis MEMS scanning mirror targeted for various laser steering applications.

The MAR1500 is based on Maradin’s cutting edge MEMS technology. It has a powerful electro-magnetic actuator, along with on chip capacitive sensors, to enable a feedback-controlled operation in various scanning patters, such as: oscillations, ramp, point-to-point etc. The MAR1500 is designed to work with MAR2000 controller, to provide a high accuracy full scanning solution.

KEY FEATURES AND BENEFITS

  • 1D single mirror 1.5mm

  • A single axis mirror

  • Various of scanning patters

  • Powerful electro-magnetic actuator

  • A full, real time FOV control (size and location)

  • High scanning accuracy

  • Flexibility and Customization

    Packaging

    Maradin package can be fully adapted to the needs of different systems

    • Plastics, ideal for low cost consumer applications of display and sensing

  • Ceramics, could meet the requirements of the automotive market

  • Optical coating

    • Custom laser wavelength coating using Bragg reflectors

  • More than 97% reflectivity for UV (405nm), Visible (450~700), IR (800~1550) laser

  • Laser Damage Threshold

  • Scanning Patterns

    • Operates in a verity of scanning patterns: Oscillations, Ramp, Triangular, Point to point etc.

  • The scan patterns could be raster or point to point, either continuance scanning mode or investigation mode

  • Works as a standalone scanner or as a 2D combination of 2x1D scanners

  • MAR1500 Common Applications

    • Automotive

      Automotive grade design, including a special hermetic packaging with advanced heat dissipation. High stability for vibrations and temperature changes.

    • Sensors

      Operates in a verity of scanning patterns, with the ability to match different sensors and lasers Multiple scan patterns could be used.

    MAR1500 – MEMS SCANNING MIRROR SPEC:

    Parameter Min Typical Value Max Unit Remarks
    Optical angle
     
    7.5
     
    Deg.
     
    Pixel position error
     
    0.4
     
    mRad
    Scan regime dependent
    Scan Frequency Range
    1
     
    2200
    Hz
    Scan regime dependent
    Resonance frequency
    1950
    2100
    2250
    Hz
     
    Mirror size
     
    1.37x1.59
     
    mm
    Along the rotational axis
    MEMS Scanning Module dimensions
    10x5.5x4.6
    12x6.5x5.9
     
    mm
    Length X Width X Height
    MEMS Scanning module power consumption
     
    70
     
    mW
    RMS; Scan regime dependent
    Package
     
    Plastic, Non-Hermetic
     
     
    Optional: Ceramic, Hermetic
    Parameter Min Typical Value Max Unit Remarks
    Mirror flatness
     
    150
    300
    nm
     
    Mirror reflectance
    90
     
    93
    %
    Aluminum coating; Coating could be adjusted to achieve higher reflectance
    Overall reflectance
    84
    85
    86
    %
    Mirror and Optical window
    Wave length range for reflection
    440
     
    9000
    nm
    Optical window coating dependent
    laser max spot size
     
     
    1.15
    mm
    @1/e^2
    Laser max Power
     
     
    2
    W
     
    MARADIN'S TECHNOLOGY INCLUDES THE FOLLOWING KEY ELEMENTS:

    Fast electrostatic (ES) actuator with minimal power consumption. The ES actuator operates in the self-resonance frequency of the mirror and is ideal for high scan frequencies (tens of KHz).

  • Strong and accurate electromagnetic (EM) actuator. The EM actuator is ideal for point-to-point or slow scan patterns.

  • Capacitive sensors measure the mirror angular position with very high precision and fast response.

  • Sophisticated control circuitry and algorithms perform continuous, close control of the mirror motion, ensuring the utmost accuracy, repeatability and temperature stability.

  • MAR1500 in Numbers

    Maradin
    Projecting the Future
    Founded in

    0

    US granted
    patent on MEMS,
    control and system firmware

    0

    More than

    0

    years of
    MEMS
    experience

    More than

    0

    years of
    MEMS
    experience

    Let's Talk

    Intersted with Our Technology?

    Order the Eavalution Kit

    2d scanning MEMS Evaluation Kit enables Maradin`s laser-based projection core components

    Get Started Now!
    Skip to content