MAR1500 | 1D Scanning Mirror

MAR1500 1D MEMS LASER SCANNING MIRROR (1.5MM)

MAR1500 is a 1D, single-axis MEMS scanning mirror targeted for various laser steering applications.

The MAR1500 is based on Maradin’s cutting edge MEMS technology. It has a powerful electro-magnetic actuator, along with on chip capacitive sensors, to enable a feedback-controlled operation in various scanning patters, such as: oscillations, ramp, point-to-point etc. The MAR1500 is designed to work with MAR2000 controller, to provide a high accuracy full scanning solution.

KEY FEATURES AND BENEFITS

  • 1D single mirror 1.5mm

  • A single axis mirror

  • Various of scanning patters

  • Powerful electro-magnetic actuator

  • A full, real time FOV control (size and location)

  • High scanning accuracy

Flexibility and Customization

Packaging

Maradin package can be fully adapted to the needs of different systems

  • Plastics, ideal for low cost consumer applications of display and sensing

  • Ceramics, could meet the requirements of the automotive market

Optical coating

  • Custom laser wavelength coating using Bragg reflectors

  • More than 97% reflectivity for UV (405nm), Visible (450~700), IR (800~1550) laser

  • Laser Damage Threshold

Scanning Patterns

  • Operates in a verity of scanning patterns: Oscillations, Ramp, Triangular, Point to point etc.

  • The scan patterns could be raster or point to point, either continuance scanning mode or investigation mode

  • Works as a standalone scanner or as a 2D combination of 2x1D scanners

MAR1500 Common Applications

  • Automotive

    Automotive grade design, including a special hermetic packaging with advanced heat dissipation. High stability for vibrations and temperature changes.

  • Sensors

    Operates in a verity of scanning patterns, with the ability to match different sensors and lasers Multiple scan patterns could be used.

MAR1500 – MEMS SCANNING MIRROR SPEC:

Parameter Min Typical Value Max Unit Remarks
Optical angle
 
7.5
 
Deg.
 
Pixel position error
 
0.4
 
mRad
Scan regime dependent
Scan Frequency Range
1
 
2200
Hz
Scan regime dependent
Resonance frequency
1950
2100
2250
Hz
 
Mirror size
 
1.37x1.59
 
mm
Along the rotational axis
MEMS Scanning Module dimensions
10x5.5x4.6
12x6.5x5.9
 
mm
Length X Width X Height
MEMS Scanning module power consumption
 
70
 
mW
RMS; Scan regime dependent
Package
 
Plastic, Non-Hermetic
 
 
Optional: Ceramic, Hermetic
Parameter Min Typical Value Max Unit Remarks
Mirror flatness
 
150
300
nm
 
Mirror reflectance
90
 
93
%
Aluminum coating; Coating could be adjusted to achieve higher reflectance
Overall reflectance
84
85
86
%
Mirror and Optical window
Wave length range for reflection
440
 
9000
nm
Optical window coating dependent
laser max spot size
 
 
1.15
mm
@1/e^2
Laser max Power
 
 
2
W
 
MARADIN'S TECHNOLOGY INCLUDES THE FOLLOWING KEY ELEMENTS:
  • Fast electrostatic (ES) actuator with minimal power consumption. The ES actuator operates in the self-resonance frequency of the mirror and is ideal for high scan frequencies (tens of KHz).

  • Strong and accurate electromagnetic (EM) actuator. The EM actuator is ideal for point-to-point or slow scan patterns.

  • Capacitive sensors measure the mirror angular position with very high precision and fast response.

  • Sophisticated control circuitry and algorithms perform continuous, close control of the mirror motion, ensuring the utmost accuracy, repeatability and temperature stability.

MEMS Evaluation Kit
MAR1500 in Numbers

Maradin
Projecting the Future
Founded in

0

US granted
patent on MEMS,
control and system firmware

0

More than

0

years of
MEMS
experience

More than

0

years of
MEMS
experience

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