MAR1800 S/L | MEMS 1D Laser Scanning Mirror

MEMS 1D LASER SCANNING MIRROR

A 1D MIRROR WITH BOTH ELECTROSTATIC AND ELECTROMAGNETIC ACTUATION METHODS

The MAR1800 is a single axis vector scanning Mirror. MAR1800 Mirror supports large laser beam diameters (> 3mm), high deflection angles, multiple scan modes, all with very high accuracy and repeatability. The MAR1800 is designed for harsh environmental conditions, with high stiffness of the mirrors and innovative hermetic packaging. The MEMS mirrors utilize Maradin’s proprietary powerful electromagnetic actuator, which yields peak performance under varying conditions, along with a novel controller for accuracy and high performance.

KEY FEATURES AND BENEFITS

  • 1D MEMS vector scanning mirror

  • Large aperture (Laser spot up to 3mm)

  • Electro-magnetic actuators for wide optical field-of-view

  • A full, real time FOV control (size and location)

  • Accurate and continuous sensing mechanisms for precise mirror control

  • Hermetic ceramic package

  • Flexibility and Customization

    Packaging

    • Maradin package can be fully adapted to the needs of high lasers heat dissipation using Ceramic package

    Optical coating

    Maradin has the ability to adjust the coating of the MEMS to the different wavelengths.

    • High Laser Damage Threshold

  • Custom laser wavelength coating using Bragg reflectors

  • Typically comes with Au coating to fit high laser power

  • Scanning Patterns

    • Operates in a verity of scanning patterns: Oscillations, Ramp, Triangular, Point to point etc.

  • The scan patterns could be raster or point to point, either continuance scanning mode or investigation mode

  • Works as a standalone scanner or as a 2D combination of 2xMAR1800S/L scanners

  • MAR1800 S/L MEMS 1D Scanning Mirrors Common Applications

    • Sensors

      Operates in a verity of scanning patterns, with the ability to match different sensors and lasers Multiple scan patterns could be used A special hermetic packaging with advanced heat dissipation.

    MAR1800S/L – MEMS SCANNING MIRROR SPEC:

    Parameter Min Typical Value Max Unit Remarks
    Pixel position error
     
    1
     
    mRad
    Both vertical and Horizontal
    Scan Frequency Range
    1
    100
    150
    Hz
     
    Optical angle (HxV)
     
    20x10
    20x20
    Deg.
    HFOV x VHOV
    V Mirror natural Frequency
    1.1
    1.3
    1.5
    KHz
     
    H Mirror natural Frequency
    0.9
    1
    1.1
    KHz
     
    Effective mirror size (V)
     
    3.6X4.7
     
    mm
     
    Effective mirror size (H)
     
    3.6X8.5
     
    mm
     
    MEMS Scanning module power consumption
     
     
    <350
    mW
    RMS for single mirror.
    Mirror deflection dependent
    Parameter Min Typical Value Max Unit Remarks
    Mirror flatness
     
    350
    800
    nm
     
    Mirror reflectance
    90
     
    99.5
    %
    High Reflecting Coating upon request
    Overall reflectance
    84
    85
    86
    %
    Mirror and Optical window
    Wave length range for reflection
    440
     
    9000
    nm
    Optical window coating dependent
    laser max spot size
     
     
    3
    mm
    @1/e^2
    Laser max Power
     
     
    2
    W
     

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