MAR1100 – MEMS 2D LASER SCANNING MIRROR

A 2D MIRROR WITH BOTH ELECTROSTATIC AND ELECTROMAGNETIC ACTUATION METHODS

A MEMS (Micro Electro Mechanical System) mirror is a tiny solid-state mirror (mirror on a chip) actuated by micro-size motors in one or two dimensions. A laser beam pointed at the mirror is precisely deflected and steered by the scanning mirror to reach a target point at a specific time.
Maradin's technology suite is the core of Maradin MEMS scanning mirrors.

Applications:
pico-projector
eyewear-display2
medic
hud
hand
industry

MARADIN'S TECHNOLOGY INCLUDES THE FOLLOWING KEY ELEMENTS:
  • Fast electrostatic (ES) actuator with minimal power consumption. The ES actuator operates in the self-resonance frequency of the mirror and is ideal for high scan frequencies (tens of KHz).

  • Strong and accurate electromagnetic (EM) actuator. The EM actuator is ideal for point-to-point or slow scan patterns.

  • Capacitive sensors measure the mirror angular position with very high precision and fast response.

  • Sophisticated control circuitry and algorithms perform continuous, close control of the mirror motion, ensuring the utmost accuracy, repeatability and temperature stability.

KEY FEATURES AND BENEFITS
  • 2D single mirror– Minimizes optical engine size and increases optical efficiency

  • Combination of electrostatic (H) and electromagnetic (V) actuators – Improves robustness and optimizes performance

  • Wide optical FOV, 45° (H) x 30° (V) – Delivers large image/scan area

  • High-sensitivity, dynamic closed control loops – Maintain stable peak performance even during changes in ambient conditions

  • Static mirror alarm signal – Supports eye safety

  • MEMS controller with standard digital video interface – Simplifies system design and integration

  • Non-hermetic plastic package – Reduces cost

  • Temperature Stability –  A perfect image over a wide temperature range

MAR1100 – MEMS Scanning Mirror Spec:
 ItemSpecification
GeneralOptical angle (H x V)

Typ.: 45x20 Deg.

Max: 45x30 Deg.

Resolution (HxV)

Typ.: 1280x480 pixels

Max: 1280x600 pixels

Pixel position error+/- 1/5 pixel
Resonance frequency (H)10,250 Hz
Resonance frequency (V)1800 Hz
Effective mirror size (H)1 mm
Effective mirror size (V)1.1 mm
MEMS Scanning Module dimensions (L x W x H)

Typ.: 12×6.5×5.9 mm

Small: 10×5.5×4.6 mm

MEMS Scanning module power consumption70 mW (rms)
Package

Typ.: Plastic, Non-Hermetic

Custom: Ceramic, Hermetic

OpticalThrow Ratio1.2
Incident angle (H)0 Deg.
Incident angle (V)15 – 22 Deg.
Mirror reflectance

Typ.: 90-93% (Aluminium coating)

Max: 99.5% (High Reflective Coating)

Overall reflectance85% (Mirror & Optical window)
Wavelength range for reflection

Typ.: 440 -700 mm

Custom: Any wavelength upon request

laser max spot size0.7 mm