A 2D MIRROR WITH BOTH ELECTROSTATIC AND ELECTROMAGNETIC ACTUATION METHODS
A MEMS (Micro Electro Mechanical System) mirror is a tiny solid-state mirror (mirror on a chip) actuated by micro-size motors in one or two dimensions. A laser beam pointed at the mirror is precisely deflected and steered by the scanning mirror to reach a target point at a specific time.
Maradin's technology suite is the core of Maradin MEMS scanning mirrors.
MARADIN'S TECHNOLOGY INCLUDES THE FOLLOWING KEY ELEMENTS:
Fast electrostatic (ES) actuator with minimal power consumption. The ES actuator operates in the self-resonance frequency of the mirror and is ideal for high scan frequencies (tens of KHz).
Strong and accurate electromagnetic (EM) actuator. The EM actuator is ideal for point-to-point or slow scan patterns.
Capacitive sensors measure the mirror angular position with very high precision and fast response.
Sophisticated control circuitry and algorithms perform continuous, close control of the mirror motion, ensuring the utmost accuracy, repeatability and temperature stability.
KEY FEATURES AND BENEFITS
2D single mirror– Minimizes optical engine size and increases optical efficiency
Combination of electrostatic (H) and electromagnetic (V) actuators – Improves robustness and optimizes performance
Wide optical FOV, 45° (H) x 30° (V) – Delivers large image/scan area
High-sensitivity, dynamic closed control loops – Maintain stable peak performance even during changes in ambient conditions
Static mirror alarm signal – Supports eye safety
MEMS controller with standard digital video interface – Simplifies system design and integration
Non-hermetic plastic package – Reduces cost
Temperature Stability – A perfect image over a wide temperature range
MAR1100 – MEMS Scanning Mirror Spec:
|General||Resolution (HxV)||Up to 1280x600 pixels|
|Pixel position error||+/- 1/5 pixels|
|Resonant frequency (H)||10,250 Hz|
|Resonant frequency (V)||1800 Hz|
|Optical angle (H x V)||36×25 Deg. (HFOV x VHOV)|
|Effective mirror size (H)||1 mm|
|Effective mirror size (V)||1.1 mm|
|MEMS Scanning Module dimensions (L x W x H)||12×6.5×5.9 mm|
|MEMS Scanning module power consumption||70 mW (rms)|
|Incident angle (H)||0 Deg.|
|Incident angle (H)||15 – 22 Deg.|
|Mirror reflectance||90-93% (Aluminium coating)|
|Overall reflectance||85% (Mirror & Optical window)|
|Wave length range for reflection||440 -700 mm (Optical window coating)|
|laser max spot size||0.7 mm|