A 2D MIRROR WITH BOTH ELECTROSTATIC AND ELECTROMAGNETIC ACTUATION METHODS
A MEMS (Micro Electro Mechanical System) mirror is a tiny solid-state mirror (mirror on a chip) actuated by micro-size motors in one or two dimensions. A laser beam pointed at the mirror is precisely deflected and steered by the scanning mirror to reach a target point at a specific time.
Maradin's technology suite is the core of Maradin MEMS scanning mirrors.
MARADIN'S TECHNOLOGY INCLUDES THE FOLLOWING KEY ELEMENTS:
Fast electrostatic (ES) actuator with minimal power consumption. The ES actuator operates in the self-resonance frequency of the mirror and is ideal for high scan frequencies (tens of KHz).
Strong and accurate electromagnetic (EM) actuator. The EM actuator is ideal for point-to-point or slow scan patterns.
Capacitive sensors measure the mirror angular position with very high precision and fast response.
Sophisticated control circuitry and algorithms perform continuous, close control of the mirror motion, ensuring the utmost accuracy, repeatability and temperature stability.
KEY FEATURES AND BENEFITS
2D single mirror– Minimizes optical engine size and increases optical efficiency
Combination of electrostatic (H) and electromagnetic (V) actuators – Improves robustness and optimizes performance
Wide optical FOV, 45° (H) x 30° (V) – Delivers large image/scan area
High-sensitivity, dynamic closed control loops – Maintain stable peak performance even during changes in ambient conditions
Static mirror alarm signal – Supports eye safety
MEMS controller with standard digital video interface – Simplifies system design and integration
Non-hermetic plastic package – Reduces cost
Temperature Stability – A perfect image over a wide temperature range
MAR1100 – MEMS Scanning Mirror Spec:
|General||Optical angle (H x V)|
Typ.: 45x20 Deg.
Max: 45x30 Deg.
Typ.: 1280x480 pixels
Max: 1280x600 pixels
|Pixel position error||+/- 1/5 pixel|
|Resonance frequency (H)||10,250 Hz|
|Resonance frequency (V)||1800 Hz|
|Effective mirror size (H)||1 mm|
|Effective mirror size (V)||1.1 mm|
|MEMS Scanning Module dimensions (L x W x H)|
Typ.: 12×6.5×5.9 mm
Small: 10×5.5×4.6 mm
|MEMS Scanning module power consumption||70 mW (rms)|
Typ.: Plastic, Non-Hermetic
Custom: Ceramic, Hermetic
|Incident angle (H)||0 Deg.|
|Incident angle (V)||15 – 22 Deg.|
Typ.: 90-93% (Aluminium coating)
Max: 99.5% (High Reflective Coating)
|Overall reflectance||85% (Mirror & Optical window)|
|Wavelength range for reflection|
Typ.: 440 -700 mm
Custom: Any wavelength upon request
|laser max spot size||0.7 mm|