MEMS Mirrors

Mirrors Cutting edge technology

Maradin provides a variety of MEMS scanning mirrors to fulfill a broad range of scanning requirements, including 2D and 1D scanning, different mirror sizes and frequencies.
MEMS Mirrors MAR1100.E 2D LASER SCANNING MIRROR
MAR1100.E
MEMS 2D LASER SCANNING MIRROR​​
  • Mirror size: 1.1 x 1mm

  • Actuation – Electrostatic (ES) and Electromagnetic (EM)

  • Operation modes: Raster, Lissajous

  • High Reflective Coating

  • Optical Packaging

MEMS Mirrors MAR1800 1D scanning mirror
MAR1800S/L
MEMS 1D scanning mirror
  • Mirror size: 3.6 x 4.7 / 3.6 x 8.5mm

  • Actuation – Electromagnetic (EM)

  • Operation modes – Oscillations, Ramp, point to point, Other

  • High Reflective Coating

  • Optical Hermetic Package

MEMS Mirrors MAR1500 1D SCANNING MIRROR
MAR1500
MEMS 1D scanning mirror
  • Mirror size: 1.3 x 1.5mm

  • Actuation – Electromagnetic (EM)

  • Operation modes – Oscillations, Ramp, point to point, Other

  • High Reflective Coating

  • Flexible package design

MEMS Mirrors Scanners

Advanced Technology

Maradin MEMS Scanners are based on a sophisticated Silicon structures that enables large scanning angles, in multiple directions, at a very precise control using C-SOI technology

Tiny actuators based on Electro-magnetic and Electro-static proprietary designs are implemented in the MEMS structure, to enable its rotation in different scanning regimes.

Capacitive sensors, carved in the Silicon, enable the sense of the MEMS movement, ensuring high precision.

Special optical coating to the MEMS mirror surface enables highest reflectivity without compromising mirror flatness.

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