MAR1800 S/L | MEMS 1D Laser Scanning Mirror​

MEMS 1D LASER SCANNING MIRROR​

A 1D MIRROR WITH BOTH ELECTROSTATIC AND ELECTROMAGNETIC ACTUATION METHODS​

The MAR1800 is a single axis vector scanning Mirror. MAR1800 Mirror supports large laser beam diameters (> 3mm), high deflection angles, multiple scan modes, all with very high accuracy and repeatability. The MAR1800 is designed for harsh environmental conditions, with high stiffness of the mirrors and innovative hermetic packaging. The MEMS mirrors utilize Maradin’s proprietary powerful electromagnetic actuator, which yields peak performance under varying conditions, along with a novel controller for accuracy and high performance.

KEY FEATURES AND BENEFITS

  • 1D MEMS vector scanning mirror

  • Large aperture (Laser spot up to 3mm)

  • Electro-magnetic actuators for wide optical field-of-view

  • A full, real time FOV control (size and location)

  • Accurate and continuous sensing mechanisms for precise mirror control

  • Hermetic ceramic package

Flexibility and Customization

Packaging

  • Maradin package can be fully adapted to the needs of high lasers heat dissipation using Ceramic package

Optical coating

Maradin has the ability to adjust the coating of the MEMS to the different wavelengths.

  • High Laser Damage Threshold

  • Custom laser wavelength coating using Bragg reflectors

  • Typically comes with Au coating to fit high laser power

Scanning Patterns

  • Operates in a verity of scanning patterns: Oscillations, Ramp, Triangular, Point to point etc.

  • The scan patterns could be raster or point to point, either continuance scanning mode or investigation mode

  • Works as a standalone scanner or as a 2D combination of 2xMAR1800S/L scanners

MAR1800 S/L MEMS 1D Scanning Mirrors Common Applications

  • Sensors

    Operates in a verity of scanning patterns, with the ability to match different sensors and lasers Multiple scan patterns could be used A special hermetic packaging with advanced heat dissipation.

MAR1800S/L – MEMS SCANNING MIRROR SPEC:

Parameter Min Typical Value Max Unit Remarks
Pixel position error
 
1
 
mRad
Both vertical and Horizontal
Scan Frequency Range
1
100
150
Hz
 
Optical angle (HxV)
 
20x10
20x20
Deg.
HFOV x VHOV
V Mirror natural Frequency
1.1
1.3
1.5
KHz
 
H Mirror natural Frequency
0.9
1
1.1
KHz
 
Effective mirror size (V)
 
3.6X4.7
 
mm
 
Effective mirror size (H)
 
3.6X8.5
 
mm
 
MEMS Scanning module power consumption
 
 
<350
mW
RMS for single mirror.
Mirror deflection dependent
Parameter Min Typical Value Max Unit Remarks
Mirror flatness
 
350
800
nm
 
Mirror reflectance
90
 
99.5
%
High Reflecting Coating upon request
Overall reflectance
84
85
86
%
Mirror and Optical window
Wave length range for reflection
440
 
9000
nm
Optical window coating dependent
laser max spot size
 
 
3
mm
@1/e^2
Laser max Power
 
 
2
W
 

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