MAR1500 | 1D Scanning Mirror

MAR1500 1D MEMS LASER SCANNING MIRROR (1.5MM)

MAR1500 is a 1D, single-axis MEMS scanning mirror targeted for various laser steering applications.

The MAR1500 is based on Maradin’s cutting edge MEMS technology. It has a powerful electro-magnetic actuator, along with on chip capacitive sensors, to enable a feedback-controlled operation in various scanning patters, such as: oscillations, ramp, point-to-point etc. The MAR1500 is designed to work with MAR2000 controller, to provide a high accuracy full scanning solution.

KEY FEATURES AND BENEFITS

  • 1D single mirror 1.5mm

  • A single axis mirror

  • Various of scanning patters

  • Powerful electro-magnetic actuator

  • A full, real time FOV control (size and location)

  • High scanning accuracy

Flexibility and Customization

Packaging

Maradin package can be fully adapted to the needs of different systems

  • Plastics, ideal for low cost consumer applications of display and sensing

  • Ceramics, could meet the requirements of the automotive market

Optical coating

  • Custom laser wavelength coating using Bragg reflectors

  • More than 97% reflectivity for UV (405nm), Visible (450~700), IR (800~1550) laser

  • Laser Damage Threshold

Scanning Patterns

  • Operates in a verity of scanning patterns: Oscillations, Ramp, Triangular, Point to point etc.

  • The scan patterns could be raster or point to point, either continuance scanning mode or investigation mode

  • Works as a standalone scanner or as a 2D combination of 2x1D scanners

MAR1500 Common Applications

  • Automotive

    Automotive grade design, including a special hermetic packaging with advanced heat dissipation. High stability for vibrations and temperature changes.

  • Sensors

    Operates in a verity of scanning patterns, with the ability to match different sensors and lasers Multiple scan patterns could be used.

MAR1500 – MEMS SCANNING MIRROR SPEC:

Parameter Min Typical Value Max Unit Remarks
Optical angle
 
7.5
 
Deg.
 
Pixel position error
 
0.4
 
mRad
Scan regime dependent
Scan Frequency Range
1
 
2200
Hz
Scan regime dependent
Resonance frequency
1950
2100
2250
Hz
 
Mirror size
 
1.37x1.59
 
mm
Along the rotational axis
MEMS Scanning Module dimensions
10x5.5x4.6
12x6.5x5.9
 
mm
Length X Width X Height
MEMS Scanning module power consumption
 
70
 
mW
RMS; Scan regime dependent
Package
 
Plastic, Non-Hermetic
 
 
Optional: Ceramic, Hermetic
Parameter Min Typical Value Max Unit Remarks
Mirror flatness
 
150
300
nm
 
Mirror reflectance
90
 
93
%
Aluminum coating; Coating could be adjusted to achieve higher reflectance
Overall reflectance
84
85
86
%
Mirror and Optical window
Wave length range for reflection
440
 
9000
nm
Optical window coating dependent
laser max spot size
 
 
1.15
mm
@1/e^2
Laser max Power
 
 
2
W
 
MARADIN'S TECHNOLOGY INCLUDES THE FOLLOWING KEY ELEMENTS:
  • Fast electrostatic (ES) actuator with minimal power consumption. The ES actuator operates in the self-resonance frequency of the mirror and is ideal for high scan frequencies (tens of KHz).

  • Strong and accurate electromagnetic (EM) actuator. The EM actuator is ideal for point-to-point or slow scan patterns.

  • Capacitive sensors measure the mirror angular position with very high precision and fast response.

  • Sophisticated control circuitry and algorithms perform continuous, close control of the mirror motion, ensuring the utmost accuracy, repeatability and temperature stability.

MAR1500 in Numbers

Maradin
Projecting the Future
Founded in

0

US granted
patent on MEMS,
control and system firmware

0

More than

0

years of
MEMS
experience

More than

0

years of
MEMS
experience

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