MAR1800

MAR1800

The MAR1800 is a MEMS 2D vector scanning mirror module, comprises of 2 single axis vector scanners, attached together (Figure 1 shows an illustration of the module).  MAR1800 module supports large laser beam diameters (> 3mm), high deflection angles, multiple scan modes, all with very high accuracy and repeatability.  The MAR1800 is designed for harsh environment conditions, with high stiffness of the mirrors and an innovative hermetic packaging.  The MEMS mirrors utilizes Maradin's proprietary powerful electro-magnetic actuator, which yields peak performance under varying conditions, along with a novel controller for accuracy and high performance.

Applications:
medic
industry

KEY FEATURES AND BENEFITS
  • 2D MEMS vector scanning mirrors module
  • Large aperture (Laser spot up to 3mm)
  • Electro-magnetic actuators for wide optical field-of-view
  • A full, real time FOV control (size and location)
  • Accurate and continuous sensing mechanisms for precise mirror control
  • Hermetic ceramic package
MAR1800 – MEMS SCANNING MIRROR SPEC:

 

Parameter

Min

Typical Value

Max

Unit

Remarks

General

Pixel position error

 

1

 

mRad

Both vertical and Horizontal

Scan Frequency Range

1

100

150

Hz

 

Optical angle (HxV)

 

20x10

20x20

Deg.

HFOV x VHOV

V Mirror natural Frequency

1.1

1.3

1.5

KHz

 

H Mirror natural Frequency

0.9

1

1.1

KHz

 

Effective size -V mirror

 

3.6X4.7

 

mm

 

Effective size -H mirror

 

3.6X8.5

 

 

 

MEMS Scanning module power consumption

 

 

<350

mW

RMS for single mirror.

Mirror deflection dependent

Optical

Mirror flatness

 

350

800

nm

 

Mirror reflectance

90

 

93

%

Aluminum coating

Overall reflectance

84

85

86

%

Mirror and Optical window

Wave length range for reflection

440

 

9000

nm

Optical window coating dependent

laser max spot size

 

 

3

mm

@1/e^2

Laser max Power

 

 

2

W

 

Parameter

Min

Typical Value

Max

Unit

Remarks