MAR1800
The MAR1800 is a MEMS 2D vector scanning mirror module, comprises of 2 single axis vector scanners, attached together (Figure 1 shows an illustration of the module). MAR1800 module supports large laser beam diameters (> 3mm), high deflection angles, multiple scan modes, all with very high accuracy and repeatability. The MAR1800 is designed for harsh environment conditions, with high stiffness of the mirrors and an innovative hermetic packaging. The MEMS mirrors utilizes Maradin's proprietary powerful electro-magnetic actuator, which yields peak performance under varying conditions, along with a novel controller for accuracy and high performance.
Applications:


KEY FEATURES AND BENEFITS
- 2D MEMS vector scanning mirrors module
- Large aperture (Laser spot up to 3mm)
- Electro-magnetic actuators for wide optical field-of-view
- A full, real time FOV control (size and location)
- Accurate and continuous sensing mechanisms for precise mirror control
- Hermetic ceramic package
MAR1800 – MEMS SCANNING MIRROR SPEC:
Parameter | Min | Typical Value | Max | Unit | Remarks | |
General | Pixel position error | 1 | mRad | Both vertical and Horizontal | ||
Scan Frequency Range | 1 | 100 | 150 | Hz | ||
Optical angle (HxV) | 20x10 | 20x20 | Deg. | HFOV x VHOV | ||
V Mirror natural Frequency | 1.1 | 1.3 | 1.5 | KHz | ||
H Mirror natural Frequency | 0.9 | 1 | 1.1 | KHz | ||
Effective size -V mirror | 3.6X4.7 | mm | ||||
Effective size -H mirror | 3.6X8.5 | mm | ||||
MEMS Scanning module power consumption | <350 | mW | RMS for single mirror. Mirror deflection dependent | |||
Optical | Mirror flatness | 350 | 800 | nm | ||
Mirror reflectance | 90 | 99.5 | % | High Reflecting Coating upon request | ||
Overall reflectance | 84 | 85 | 86 | % | Mirror and Optical window | |
Wave length range for reflection | 440 | 9000 | nm | Optical window coating dependent | ||
laser max spot size | 3 | mm | @1/e^2 | |||
Laser max Power | 2 | W |